- About
- Research Platform
- Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering
- Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die
- Shenzhen Key Laboratory of Electromagnetic Control
- Shenzhen Autonomous Unmanned System and Intelligent Operation Joint Laboratory
- Shenzhen Key Laboratory of Urban Rail Transit Technology
- Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering
- Research Institutes
- Institute of Semiconductor Manufacturing Research
- Institute of Precision Machining and Forming Technology
- Institute of Nano-surface Science and Engineering
- Additive Manufacturing Institute
- Institute of Automation Shenzhen University
- Institute of Intelligent Equipment and Detection Technology
- Institute of Human Factors Engineering
- Institute of Power Electronics and Power System Control Technology
- Institute of Robotics and Intelligent Equipment
- Institute of Semiconductor Manufacturing Research
In response to the status quo of China's semiconductor industry's "soft and hard" (strong design/weak manufacturing)", Shenzhen University established the Semiconductor Manufacturing Research Institute in 2019, focusing on the research and development of semiconductor "stuck neck" manufacturing technology, based in Shenzhen, Guangdong, Hong Kong, and Macao. The Greater Bay Area will give full play to the industry-university-research mechanism, directly serve the domestic semiconductor manufacturing industry, and solve the urgent needs of the country.
The founding dean of the institute is Academician Wang Xujin, a full-time distinguished professor at Shenzhen University. Academician Wang Xujin has been engaged in the research and development of micro-nano manufacturing, chip manufacturing core technology, equipment, and devices for many years at home and abroad and is a world-class top expert in this field. In the field of gear precision machining, it successfully developed a high-efficiency and economical profile grinding process and won the first China Youth Science and Technology Award. The developed LED sapphire substrate ultra-precision processing technology has made a significant contribution to the world's first LED mass production. In the field of semiconductor manufacturing, it has successfully developed the world's lowest voltage CMP process and equipment for low-k insulating layer planarization. This achievement has been highly praised by the international CMP industry and won the Technology Award of the Japan Institute of Precision Engineering. Successfully developed a new type of optical micro-nano device for on-line inspection of the projection lens of the immersion lithography machine and realized the stable mass production of the immersion lithography process of high-end semiconductor chips. In the field of advanced imaging technology, it has successfully developed the world's highest-performance multi-spectral camera that simultaneously realizes RGB visible light and NIR near-infrared imaging on a single image sensor. Academician Wang Xujin has been authorized to file dozens of invention patents in Japan, the United States, China, and South Korea.
Administrative scientific research institutions such as the office, lithography machine R&D center, sensor R&D center, and SiC device R&D center. All scientific research teams implement the PI responsibility system. There are now more than 20 teams and more than 40 postgraduates. Each team conducts industry-university research and development with related companies in the field. The research institute is currently conducting research and development in the core components of lithography machines and key processes and equipment in the front and rear of semiconductor manufacturing (including etching, film formation, CMP, scribing, advanced packaging, etc.). In order to meet the growing needs of the Institute, it has long been recruiting full-time researchers and postdoctoral researchers in the fields of semiconductor chip manufacturing technology, micro-nano manufacturing technology, microelectronic devices and ultra-precision processing. For recruitment details, please refer to the website of the Human Resources Department of Shenzhen University (https://hr.szu.edu.cn). Interested applicants, please send electronic documents such as personal resume results to the email address of Vice President Guo Dengji: guodj@szu.edu.cn, with the subject of the email as: Apply for full-time researcher/postdoctoral fellow + name + doctoral school name.